The LMX precision cross table we supply is used for the simultaneous inspection of silicon wafers.
With its ultra-flat rotation axis in the X and Y directions, the customised cross table positions with µ-precision and also operates extremely quickly with 1 g acceleration. Mounted on a granite base, our linear guides, linear motors and a rotary table create a motion unit that, in addition to simple handling tasks, also performs high-precision positioning tasks with minimum height and maximum hollow shaft.
Standardised drive components are used to create customised precision systems as if from a modular system. There are large number of sophisticated, standardised systems available, which can be precisely customised to individual needs thanks to their modular design. Our experts work together with you to draw up the concept for the precision system that is best suited to your needs. Find out more about our precision axes & precision systems here. here.
Requirements:
- µ-accurate movements
- Extremely high accelerations
- High precision and repeat accuracy
HIWIN components:
- DMS rotary table
- HG linear guideways
- Distance measuring system
- LMC linear motors
Application areas: